Sputter deposition of stress-controlled piezoelectric AlN...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2014 / 8 Vol. 61; Iss. 8

Sputter deposition of stress-controlled piezoelectric AlN and AlScN films for ultrasonic and energy harvesting applications

Barth, Stephan, Bartzsch, Hagen, Gloess, Daniel, Frach, Peter, Herzog, Thomas, Walter, Susan, Heuer, Henning
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Volume:
61
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
DOI:
10.1109/TUFFC.2014.3040
Date:
August, 2014
File:
PDF, 2.47 MB
english, 2014
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