[IEEE ICMTS 2000. Proceedings of the 2000 International Conference on Microelectronic Test Structures - Monterey, CA, USA (13-16 March 2000)] ICMTS 2000. Proceedings of the 2000 International Conference on Microelectronic Test Structures (Cat. No.00CH37095) - Optimization of low-k dielectric (fluorinated SiO/sub 2/) process and evaluation of yield impact by using BEOL test structures

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