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[IEEE 2004 24th International Conference on Microelectronics - Nis, Serbia (16-19 May 2004)] 2004 24th International Conference on Microelectronics (IEEE Cat. No.04TH8716) - Numerical modeling of silicon etching in CF/sub 4//O/sub 2/ plasma-chemical system
Grigoryev, Yu.N., Gorobchuk, A.G.Volume:
2
Year:
2004
Language:
english
DOI:
10.1109/ICMEL.2004.1314866
File:
PDF, 317 KB
english, 2004