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[IEEE 2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Bangalore, India (2007.07.11-2007.07.13)] 2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits - The Defects of Silicon Reacted with Carbon Content Vapour in ULSI Nano-meter-Generation Technology
Chen, Po-Ying, Chen, Shen-Li, Tsai, Ming-Hsiung, Jing, M. H., Lin, T.-C., Kuo, Cheng-ChiaYear:
2007
Language:
english
DOI:
10.1109/IPFA.2007.4378101
File:
PDF, 2.43 MB
english, 2007