Effects of Annealing on Luminescence of ZnO Films Deposited...

Plasma Science and Technology 2005 / 02 Vol. 7; Iss. 1

Effects of Annealing on Luminescence of ZnO Films Deposited on Si Substrates by RF Magnetron Sputtering

Zhaoyuan, Ning, Huoquan, Li
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Volume:
7
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/7/1/015
Date:
February, 2005
File:
PDF, 435 KB
english, 2005
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