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[IEEE 2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Gainesville, FL, USA (2010.09.28-2010.10.1)] 2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Formation of titanium silicide by Millisecond Anneal
Beneyton, R., Morin, P., Muthukrishnan, S., Larmagnac, D., Mayur, A., Richard, C. T.Year:
2010
Language:
english
DOI:
10.1109/RTP.2010.5623790
File:
PDF, 1.12 MB
english, 2010