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[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - An electrostatically-actuated MEMS switch for power applications
Jo-Ey Wong,, Lang, J.H., Schmidt, M.A.Year:
2000
Language:
english
DOI:
10.1109/MEMSYS.2000.838592
File:
PDF, 586 KB
english, 2000