Low-loss Silicon Oxynitride Waveguides and Branches for the...

Japanese Journal of Applied Physics 2008 / 8 Vol. 47; Iss. 8

Low-loss Silicon Oxynitride Waveguides and Branches for the 850-nm-Wavelength Region

Tsuchizawa, Tai, Watanabe, Toshifumi, Yamada, Koji, Fukuda, Hiroshi, Itabashi, Seiichi, Fujikata, Junichi, Gomyo, Akiko, Ushida, Jun, Okamoto, Daisuke, Nishi, Kenichi, Ohashi, Keishi
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Volume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.6739
Date:
August, 2008
File:
PDF, 327 KB
english, 2008
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