[IEEE 2009 International Semiconductor Conference (CAS 2009) - Sinaia, Romania (2009.10.12-2009.10.14)] 2009 International Semiconductor Conference - Thin polyimide films for dielectric interlayer application
Damaceanu, Mariana-Dana, Rusu, Radu-Dan, Bruma, Maria, Muller, AlexandruYear:
2009
Language:
english
DOI:
10.1109/SMICND.2009.5336709
File:
PDF, 763 KB
english, 2009