Thermal and stress studies of the 30.4nm Mo/Si multilayer mirror for the moon-based EUV camera
Li, Yunpeng, Zhang, Hongji, Wang, Haifeng, He, Fei, Wang, Xiaodong, Liu, Yang, Han, Suli, Zheng, Xin, Wang, Xiaoduo, Chen, Bin, Li, Haibo, Chen, Bo, Cao, JianlinVolume:
317
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.08.188
Date:
October, 2014
File:
PDF, 1.85 MB
english, 2014