[Japan Soc. Appl. Phys 1995 Symposium on VLSI Technology....

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[Japan Soc. Appl. Phys 1995 Symposium on VLSI Technology. Digest of Technical Papers - Kyoto, Japan (6-8 June 1995)] 1995 Symposium on VLSI Technology. Digest of Technical Papers - Copper integration into 0.5 μm BiCMOS technology

Gelatos, A.V., Nguyen, B.-Y., Perry, K., Marsh, R., Peschke, J., Filipiak, S., Travis, E., Bhat, N., La, L.B., Thompson, M., Saaranen, T., Tobin, P.J.
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Year:
1995
Language:
english
DOI:
10.1109/VLSIT.1995.520842
File:
PDF, 271 KB
english, 1995
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