Guided lamb wave electroacoustic devices on micromachined AlN/Al plates
F. Di Pietrantonio, M. Benetti, D. Cannata, R. Beccherelli, E. VeronaVolume:
57
Year:
2010
Language:
english
DOI:
10.1109/TUFFC.2010.1530
File:
PDF, 855 KB
english, 2010