Effects of gate notching profile defect on performance...

IEEE Electron Device Letters 2003 Vol. 24; Iss. 12

Effects of gate notching profile defect on performance characteristics of short-channel NMOSFET with channel length of 0.12 μm

Sang-hun Seo, Won-suk Yang, Sung-jin Kim, Jun-yong Ju, Joo-young Kim, Hyun-chul Peak, Seung-hyun Park, Seug-gyu Kim, Kyeong-tae Kim
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Volume:
24
Year:
2003
Language:
english
DOI:
10.1109/LED.2003.818836
File:
PDF, 303 KB
english, 2003
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