[IEEE Proceedings of the 34th European Solid-State Device Research Conference - Leuven, Belgium (21-23 Sept. 2004)] Proceedings of the 30th European Solid-State Circuits Conference (IEEE Cat. No.04EX850) - TCAD modelling of PLAD implantations and application to sub-65nm technological nodes [plasma doping]
Vet, L., Robilliart, E., Lenoble, D., Grouillet, A., Lallement, F., Dray, A., Salvetti, F., Villanueva, D., Balossier, E., Jaouen, H., Walther, S., Jeong, U., Mehta, S.Year:
2004
Language:
english
DOI:
10.1109/ESSDER.2004.1356575
File:
PDF, 243 KB
english, 2004
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