[IEEE Eleventh Biennial University/Government/ Industry Microelectronics Symposium - Austin, TX, USA (16-17 May 1995)] Proceedings of the Eleventh Biennial University/Government/ Industry Microelectronics Symposium - Breakdown mechanisms and stress-induced leakage current in ultra-thin oxides and N/sub 2/O oxynitrides
Chou, A.I., Lai, K., Kumar, K., Chowdhury, P., Ming-Yin Hao,, Wei-Ming Chen,, Gardner, M., Fulford, J., Lee, J.C.Year:
1995
Language:
english
DOI:
10.1109/UGIM.1995.514122
File:
PDF, 343 KB
english, 1995