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[IEEE Seventeenth IEEE/CPMT International Electronics Manufacturing Technology Symposium. 'Manufacturing Technologies - Present and Future' - Austin, TX, USA (2-4 Oct. 1995)] Seventeenth IEEE/CPMT International Electronics Manufacturing Technology Symposium. 'Manufacturing Technologies - Present and Future' - Development of integrated process control system utilizing neural network for plasma etching
Taek-Beom Koh,, Sang-Yeob Cha,, Kwang Bang Woo,, Dae-Sik Moon,, Kyu Hwan Kwak,, Ho Seung Chang,Year:
1995
Language:
english
DOI:
10.1109/IEMT.1995.526118
File:
PDF, 533 KB
english, 1995