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The Formation and the Plane Indices of Etched Facets of Wet Etching Patterned Sapphire Substrate
Chen, Yu-Chung, Hsiao, Feng-Ching, Lin, Bo-Wen, Wang, Bau-Ming, Sermon Wu, YewChung, Hsu, Wen-ChingVolume:
159
Year:
2012
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/2.095206jes
File:
PDF, 258 KB
english, 2012