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Notice of Violation of IEEE Publication PrinciplesKa-band distributed MEMS phase shifters on silicon using AlSi suspended membrane
Jian Qing, Yanling Shi, Wei Li, Zongsheng Lai, Ziqiang Zhu, Peisheng XinVolume:
13
Year:
2004
Language:
english
DOI:
10.1109/JMEMS.2004.828734
File:
PDF, 442 KB
english, 2004