Sources and transport mechanisms of gaseous impurities in...

IEEE Transactions on Semiconductor Manufacturing 1996 Vol. 9; Iss. 3

Sources and transport mechanisms of gaseous impurities in vertical thermal reactors

N. Verma, Ce Ma, E. Shero, F. Shadman
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Volume:
9
Year:
1996
Language:
english
DOI:
10.1109/66.536104
File:
PDF, 840 KB
english, 1996
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