Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2004 Vol. 22; Iss. 6
Mold deformation in nanoimprint lithography
Lazzarino, F., Gourgon, C., Schiavone, P., Perret, C.Volume:
22
Year:
2004
Language:
english
DOI:
10.1116/1.1815299
File:
PDF, 915 KB
english, 2004