Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2001 Vol. 19; Iss. 1
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Reliable Ti/Al and Ti/Al/Ni/Au ohmic contacts to n-type GaN formed by vacuum annealing
N. A. Papanicolaou, M. V. Rao, J. Mittereder, W. T. AndersonVolume:
19
Year:
2001
Language:
english
DOI:
10.1116/1.1331291
File:
PDF, 616 KB
english, 2001