![](/img/cover-not-exists.png)
Structural peculiarities and aging effect in hydrogenated a-Si prepared by inductively coupled plasma assisted chemical vapor deposition technique
Nogay, G., Özkol, E., Ilday, S., Turan, R.Volume:
110
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2014.09.006
Date:
December, 2014
File:
PDF, 1.12 MB
english, 2014