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[IEEE 2009 3rd International Conference on Signals, Circuits and Systems (SCS 2009) - Medenine, Tunisia (2009.11.6-2009.11.8)] 2009 3rd International Conference on Signals, Circuits and Systems (SCS) - Scaling the Damascene-Metal-Gate integration process via electron beam lithography
Wessely, Frank, Endres, Ralf, Schwalke, UdoYear:
2009
Language:
english
DOI:
10.1109/ICSCS.2009.5414217
File:
PDF, 1.29 MB
english, 2009