Robust UV/VUV/EUV PureB Photodiode Detector Technology With High CMOS Compatibility
Nanver, Lis K., Lin Qi,, Mohammadi, Vahid, Mok, K. R. M., de Boer, Wiebe B., Golshani, Negin, Sammak, Amir, Scholtes, Thomas L. M., Gottwald, Alexander, Kroth, Udo, Scholze, FrankVolume:
20
Language:
english
Journal:
IEEE Journal of Selected Topics in Quantum Electronics
DOI:
10.1109/JSTQE.2014.2319582
Date:
November, 2014
File:
PDF, 1.52 MB
english, 2014