[IEEE Proceedings of the IEEE 2004 International...

  • Main
  • [IEEE Proceedings of the IEEE 2004...

[IEEE Proceedings of the IEEE 2004 International Interconnect Technology Conference - Burlingame, CA, USA (7-9 June 2004)] Proceedings of the IEEE 2004 International Interconnect Technology Conference (IEEE Cat. No.04TH8729) - Highly reliable PVD/ALD/PVD stacked barrier metal structure for 45-nm node copper dual-damascene interconnects

Higashi, K., Yamaguchi, H., Omoto, S., Sakata, A., Katata, T., Matsunaga, N., Shibata, H.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2004
Language:
english
DOI:
10.1109/IITC.2004.1345664
File:
PDF, 232 KB
english, 2004
Conversion to is in progress
Conversion to is failed