Simulation and characterization of the selective area...

Applied Physics Letters 1999 Vol. 74; Iss. 18

Simulation and characterization of the selective area growth process

M. A. Alam, R. People, E. Isaacs, C. Y. Kim, K. Evans-lutterodt, T. Siegrist, T. L. Pernell, J. Vandenberg, S. K. Sputz, S. N. G. Chu, D. V. Lang, L. Smith, M. S. Hybertsen
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Volume:
74
Year:
1999
Language:
english
DOI:
10.1063/1.123915
File:
PDF, 364 KB
english, 1999
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