An ultrasonically levitated noncontact stage using...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2007 Vol. 54; Iss. 3

An ultrasonically levitated noncontact stage using traveling vibrations on precision ceramic guide rails

D. Koyama, T. Ide, J. Friend, K. Nakamura, S. Ueha
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Volume:
54
Year:
2007
Language:
english
DOI:
10.1109/TUFFC.2007.282
File:
PDF, 1.18 MB
english, 2007
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