[IEEE Eleventh Biennial University/Government/ Industry Microelectronics Symposium - Austin, TX, USA (16-17 May 1995)] Proceedings of the Eleventh Biennial University/Government/ Industry Microelectronics Symposium - A new methodology for fast development of multilevel metallization for ULSI technology
Islam Raja, M., El-Ghor, M., Yin, D., Pollack, G.Year:
1995
Language:
english
DOI:
10.1109/UGIM.1995.514127
File:
PDF, 499 KB
english, 1995