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[IEEE 2009 IEEE Bipolar/BiCMOS Circuits and Technology Meeting - BCTM - Capri, Italy (2009.10.12-2009.10.14)] 2009 IEEE Bipolar/BiCMOS Circuits and Technology Meeting - Ultra-thin chip fabrication for next-generation silicon processes
Burghartz, Joachim N., Harendt, Christine, Hoang, Tu, Kiss, Astrid, Zimmermann, MartinYear:
2009
Language:
english
DOI:
10.1109/BIPOL.2009.5314128
File:
PDF, 1.65 MB
english, 2009