Smooth Bosch Etch for Improved Si Diodes

IEEE Electron Device Letters 2013 / 10 Vol. 34; Iss. 10

Smooth Bosch Etch for Improved Si Diodes

Voss, Lars F., Shao, Qinghui, Conway, Adam M., Reinhardt, Cathy E., Graff, Robert T., Nikolic, Rebecca J.
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Volume:
34
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2013.2278374
Date:
October, 2013
File:
PDF, 637 KB
english, 2013
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