[IEEE ESSDERC 2011 - 41st European Solid State Device Research Conference - Helsinki, Finland (2011.09.12-2011.09.16)] 2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC) - Holed MEM resonators with high aspect ratio, for high accuracy frequency trimming
Civet, Yoan, Basrour, Skandar, Casset, Fabrice, Icard, Beatrice, Mercier, Denis, Carpentier, Jean-Francois, Bustos, Jessy, Leverd, FrancoisYear:
2011
Language:
english
DOI:
10.1109/ESSDERC.2011.6044219
File:
PDF, 736 KB
english, 2011