[IEEE 2010 21st Annual IEEE/SEMI Advanced Semiconductor...

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[IEEE 2010 21st Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - San Francisco, CA, USA (2010.07.11-2010.07.13)] 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Investigation of an on product high-k/metal metrology methodology using an in-line, high throughput XPS measurement technique

Dai, Min, Klare, Mark, Rangarajan, Srinivasan, Chudzik, Michael P, Shepard, Joseph, Tai, Leo, Ronsheim, Paul, Kwan, Mike, Larson, Tom
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Year:
2010
Language:
english
DOI:
10.1109/ASMC.2010.5551418
File:
PDF, 191 KB
english, 2010
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