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[IEEE 8th International Symposium on Electrets (ISE 8) - Paris, France (7-9 Sept. 1994)] Proceedings of 8th International Symposium on Electrets (ISE 8) - Micromachined silicon subminiature microphones with piezoelectric P(VDF/TRFE)-layers and silicon-nitride-membranes
Schellin, R., Hess, G., Kressmann, R., Wassmuth, P.Year:
1994
Language:
english
DOI:
10.1109/ISE.1994.515262
File:
PDF, 301 KB
english, 1994