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[IEEE 2007 International Conference on Perspective Technologies and Methods in MEMS Design - Lviv, Ukraine (2007.05.23-2007.05.26)] 2007 International Conference on Perspective Technologies and Methods in MEMS Design - Micro Milling Technologies for MEMS
Wang, Jinsheng, Gong, Yadong, Abba, Garbriel, Cao, Jianfeng, Shi, Jiashun, Cai, GuangqiYear:
2007
Language:
english
DOI:
10.1109/MEMSTECH.2007.4283432
File:
PDF, 6.68 MB
english, 2007