[IEEE Technical Digest. IEEE International MEMS 99...

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[IEEE Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Orlando, FL, USA (1999.01.21-1999.01.21)] Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Fabrication of optical micro-cantilever consisting of channel waveguide for scanning near-field optical microscopy controlled by atomic force

Niwa, T., Kato, K., Ichihara, S., Chiba, N., Mitsuoka, Y., Oumi, M., Shinogi, M., Nakajima, K., Muramatsu, H., Sakuhara, T., Shikida, M., Sato, K.
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Year:
1999
Language:
english
DOI:
10.1109/MEMSYS.1999.746854
File:
PDF, 602 KB
english, 1999
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