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[IEEE 2012 International Semiconductor Conference Dresden-Grenoble (ISCDG) - formerly known as the Semiconductor Conference Dresden (SCD) - Grenoble, France (2012.09.24-2012.09.26)] 2012 International Semiconductor Conference Dresden-Grenoble (ISCDG) - Development of CMOS integrated AlN based SAW-Filter and the role of Si substrate resistivity
Kaletta, U., Wolansky, D., Fraschke, M., Wenger, Ch.Year:
2012
Language:
english
DOI:
10.1109/ISCDG.2012.6359984
File:
PDF, 1.08 MB
english, 2012