Self-formation of sub-10 nm nanogaps based on silicidation

Nanotechnology 2014 / 03 Vol. 25; Iss. 11

Self-formation of sub-10 nm nanogaps based on silicidation

Tang, Xiaohui, Francis, Laurent A, Dutu, Constantin Augustin, Reckinger, Nicolas, Raskin, Jean-Pierre
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Volume:
25
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/25/11/115201
Date:
March, 2014
File:
PDF, 1.35 MB
english, 2014
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