Regression Methods for Virtual Metrology of Layer Thickness...

IEEE/ASME Transactions on Mechatronics 2014 / 02 Vol. 19; Iss. 1

Regression Methods for Virtual Metrology of Layer Thickness in Chemical Vapor Deposition

Purwins, Hendrik, Barak, Bernd, Nagi, Ahmed, Engel, Reiner, Hockele, Uwe, Kyek, Andreas, Cherla, Srikanth, Lenz, Benjamin, Pfeifer, Gunter, Weinzierl, Kurt
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Volume:
19
Language:
english
Journal:
IEEE/ASME Transactions on Mechatronics
DOI:
10.1109/TMECH.2013.2273435
Date:
February, 2014
File:
PDF, 495 KB
english, 2014
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