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[IEEE 2010 12th Electronics Packaging Technology Conference - (EPTC 2010) - Singapore, Singapore (2010.12.8-2010.12.10)] 2010 12th Electronics Packaging Technology Conference - Force transmitting element fabrication and characterization for MEMS tri-axial force sensor application
Hamidullah, Muhammad, Lim, Li Shiah, Noor, Shimul Jennifier, Yu, Daquan, Park, Woo Tae, Shao, Lichun, Ramakhrisna, Kotlanka, Feng, HanhuaYear:
2010
Language:
english
DOI:
10.1109/EPTC.2010.5702614
File:
PDF, 2.29 MB
english, 2010