Development of Sub-half Micrometric Structures with High Aspect Ratio Using a Multi-layer Lithography e-beam Process and Plasma Dry Etching
Mousinho, Ana Paula, Mansano, Ronaldo Domingues, Seabra, Antonio CarlosVolume:
374
Year:
2002
Language:
english
Journal:
Molecular Crystals and Liquid Crystals
DOI:
10.1080/10587250210491
File:
PDF, 451 KB
english, 2002