[IEEE IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' - Salt Lake City, UT, USA (20-22 Feb. 1989)] IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' - Miniature crystalline quartz electronical structure

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