Mechanical Stress Influence on Electronic Transport in...

IEEE Electron Device Letters 2013 / 08 Vol. 34; Iss. 8

Mechanical Stress Influence on Electronic Transport in Low-$k$ SiOC Dielectric Dual Damascene Capacitor

Yang, Ya-Liang, Young, Tai-Fa, Chang, Ting-Chang, Hsu, Jia-Haw, Tsai, Tsung-Ming, Jian, Fu-Yen, Chang, Kuan-Chang
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Volume:
34
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2013.2269831
Date:
August, 2013
File:
PDF, 446 KB
english, 2013
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