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[IEEE 2012 20th Telecommunications Forum Telfor (TELFOR) - Belgrade, Serbia (2012.11.20-2012.11.22)] 2012 20th Telecommunications Forum (TELFOR) - Piezoelectric MEMS stress sensor with thin lead zirconate titanate (PZT) layer
Kolev, Georgi, Aleksandrova, Mariya, Videkov, Valentin, Denishev, Krassimir, Truhchev, PetarYear:
2012
Language:
english
DOI:
10.1109/TELFOR.2012.6419376
File:
PDF, 205 KB
english, 2012