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Characterization of 36/spl deg/YX-LiTaO/sub 3/ wafers by line-focus-beam acoustic microscopy
J. Kushibiki, H. Ishiji, T. Kobayashi, N. Chubachi, I. Sahashi, T. SasamataVolume:
42
Year:
1995
Language:
english
DOI:
10.1109/58.368309
File:
PDF, 697 KB
english, 1995