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X-Ray Reflectivity Study of the Structural Properties of SiO[sub 2] and SiOF Thin Films
Ceriola, Giulio, Iacona, Fabio, La Via, Francesco, Raineri, Vito, Bontempi, Elza, Depero, Laura E.Volume:
148
Year:
2001
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1417557
File:
PDF, 274 KB
english, 2001