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Petri Net-Based Optimal One-Wafer Scheduling of Single-Arm Multi-Cluster Tools in Semiconductor Manufacturing
Zhu, QingHua, Wu, NaiQi, Qiao, Yan, Zhou, MengChuVolume:
26
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2013.2278378
Date:
November, 2013
File:
PDF, 4.95 MB
english, 2013