[IEEE Annual Conference on Electrical Insulation and Dielectric Phenomena - Pocono Manor, PA, USA (28-31 Oct. 1990)] Annual Conference on Electrical Insulation and Dielectric Phenomena - Electrical properties of dual-frequency plasma deposited silicon-compound films
Martinu, L., Klemberg-Sapieha, J.E., Kuttel, O.M., Wertheimer, M.R.Year:
1990
Language:
english
DOI:
10.1109/CEIDP.1990.201339
File:
PDF, 210 KB
english, 1990