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[IEEE Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Cannes, France (5-7 May 2003)] Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - "PLUG-UP" - a new concept for fabricating SOI MEMS devices
Kiihamaki, J., Pekko, P., Kattelus, H., Sillanpaa, T., Mattila, T.Year:
2003
Language:
english
DOI:
10.1109/DTIP.2003.1287042
File:
PDF, 358 KB
english, 2003