[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Commercial vision of silicon based inertial sensors
Cimoo Song,Volume:
2
Year:
1997
Language:
english
DOI:
10.1109/SENSOR.1997.635232
File:
PDF, 781 KB
english, 1997