[IEEE 2008 IEEE Silicon Nanoelectronics Workshop (SNW) - Honolulu, HI, USA (2008.06.15-2008.06.16)] 2008 IEEE Silicon Nanoelectronics Workshop - Impact of atomic oxide roughness and local gate depletion on Vth variation in MOSFETs
Putra, Arifin Tamsir, Tsunomura, Takaaki, Nishida, Akio, Kamohara, Shiro, Takeuchi, Kiyoshi, Hiramoto, ToshiroYear:
2008
Language:
english
DOI:
10.1109/SNW.2008.5418448
File:
PDF, 1.59 MB
english, 2008